熱線式フローセンサ

Hot wire type flow sensor

Abstract

(57)【要約】 【目的】 ヒータ線からの輻射による熱損失を抑えると 共に、熱系の熱的応答速度を増進することにより、低消 費電力型でかつ高速応答型の熱線式フローセンサを提供 することである。 【構成】 本発明の熱線式フローセンサは、熱絶縁用空 洞部を有するシリコン基板上に形成されたヒータ線の上 下面の少なくともいずれか一方側に保護膜を介して形成 された輻射防止膜を備えている。さらに、シリコン基板 を載置する基台の上面には反射増加膜が形成されてい る。
PURPOSE: To provide a high speed response-type flow sensor with low power consumption by forming a radiation preventive film on either one of the upper and lower faces or both faces of a heater wire formed on a silicon substrate having a hollow part for thermal insulation while having a protective film between them. CONSTITUTION: A heater wire 3 is formed on the upper face of a silicon substrate 1 in the condition the silicon substrate is coated with an under protective film 2a and an upper protective film 2b of SiO 2 , etc. In parallel to that, an upper radiation preventive film 4a and an upper radiation preventive film 4b are formed on both upper and under face sides while having the protective films 2a, 2b, respectively, between the films and the face sides. A hollow part 7 opened downward for thermal insulation is formed in a part of the substrate corresponding to the heater wire 3. Consequently, the heat radiated from the heater wire 3 can be lessened by the preventive films 4a, 4b and a flow sensor with little thermal loss and low power consumption can be obtained. COPYRIGHT: (C)1996,JPO

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Cited By (7)

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    US-8241582-B2August 14, 2012Casio Computer Co., Ltd.Reactor with electrical insulating film, fuel cell apparatus, electronic device and method of producing electrical insulating film
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